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The Dimension™ Hybrid XYZ scanner for the Dimension V, Nanoman VS, and BioScope SZ SPM offers lower Z sensor noise and faster scanning than any other closed-loop system available. This patented hybrid head combines the benefits of the industry-leading Dimension tube scanner technology with a uniquely designed sensored Z scanner to deliver revolutionary accuracy in a three-axis closed loop scanner. These advanced capabilities significantly expand the benefits of the Dimension V, BioScope SZ, and Dimension Series SPMs by making it possible in a single head to perform highly accurate force curves, nanoindenting and "pulling" techniques, while still delivering high-resolution images. This is an excellent scanner for nanolithography and advanced nanomanipulation applications with its ability to define and control tip movement with nanoscale accuracy.