The DMEMS Dynamic MEMS Measurement option
lets you use your Wyko® NT1100 optical profiler
to characterize micro-devices in 3D, as they actuate,
for assessment of true device functionality.
The DMEMS-equipped Wyko NT1100 is the first
system to offer both dynamic measurement and
static, white light profiling of rough surfaces and
large steps—for complete MEMS metrology on a
single platform.
The DMEMS system captures a series of 3D measurement
data, generating a video of the sample
device as it cycles through its range of motion.
Template - driven SureVision™ software lets you
locate features of interest and extract in-plane and
out-of-plane dimensions. Custom analysis software
determines resonant frequency, shape/distortion,
deflection, and other key device parameters.
Optional interfaces to external analysis software
allow calculation of user- defined parameters.
The Wyko NT1100 employs non-contact, white
light interferometry for Angstrom -resolution
measurement of features from 0.1nm to 2 mm in
height. The DMEMS option adds a proprietary
stroboscopic illuminator, synchronization electronics,
and a comprehensive, MEMS - focused
software analysis toolkit.
Veeco was the first to introduce white light profiling
capable of measuring the large feature sizes and
deflections of MEMS devices. The new dynamic
measurement option continues that history of
innovation, providing MEMS manufacturers with
unprecedented insight into their devices and
processes.