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Shimadzu has released the SolidSpec-3700/3700DUV series, their top-of-the-line UV-VIS-NIR spectrophotometers. The SolidSpec-3700DUV incorporates the ability for deep UV measurements down to 165 nm with N2 gas purging.
The SolidSpec-3700/3700DUV series was developed to satisfy the needs of the electronics and optics markets. These systems also satisfy the latest technological advances. For example, they are capable of measuring the full-area of 12-inch wafers, evaluating the near infrared reflectance of anti-reflective coatings used on optical communications-related devices, and evaluating optical materials in the deep UV region that are needed because of shorter wavelengths being used for irradiation lasers used in exposure systems for semiconductor production.
| Photometric System Design | Double Beam |
| Monochromator | Monochromator |
| Light Source | Tungsten Halogen Lamp; Double Deuterium |
| Detector Type | Other; Ultraviolet and Visible Region |
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