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Dimension X3D for Data Storage

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As device features shrink and CD accuracy becomes vital to device performance and yield, the Dimension™ X3D-DS AFM provides the precise, highly accurate 3D metrology for CD, sidewall angle and depth structures today’s leading fab operators need.

Specifications

Application Metallurgical
Grade Research
Microscope Type Scanning Probe / Atomic Force
Eyepiece Style None
Features  
User Interface  
Remote Interface  


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