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Dimension X3D Photomask

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For superior repeatability, high resolution and comprehensive profile and CD metrics for a variety of materials, the Dimension X3D-PM Atomic Force Microscope is specifically designed for demanding Photomask metrology applications.

The Dimension X3D-PM lets you gather detailed information in one tool for CD elements encountered in the most complex mask manufacturing processes.

Specifications

Application Metallurgical; Multiple CD of Lines and Spaces, etc.
Grade Research
Microscope Type Scanning Probe / Atomic Force
Eyepiece Style None
Features  
User Interface  
Remote Interface  


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