|
||
Get the highest performance device characterization and etch depth metrology available with the Dimension Atomic Force Profiler.
It is the world's only AFM single-tool fab solution designed for chemical mechanical planarization and etch metrology at 65 nm.
| Application | Metallurgical; Semiconductor |
| Grade | Research |
| Microscope Type | Scanning Probe / Atomic Force; Atomic Force Profiler (AFP) |
| Eyepiece Style | None |
| Features | |
| User Interface | |
| Remote Interface |