The new DMEMS Dynamic MEMS Measurement
option for the Wyko NT3300 Optical Profiler is
specifically designed for MEMS production metrology.
The NT3300 employs non-contact, white light
interferometry for angstrom-resolution measurement
of features from 0.1nm to 2 mm in height. The
DMEMS option adds a proprietary stroboscopic
illuminator and synchronization electronics that
permit the capture of a series of 3D measurement
data, generating a video of the sample device as
it cycles through its range of motion.
Comprehensive, MEMS-focused Wyko Vision software
lets you locate features of interest and extract
in-plane and out-of-plane dimensions, and perform a
wide variety of detailed analyses, from determining
resonant frequency and shape/distortion to characterizing
deflection and other key device parameters.
Motorized XY staging and die-to-die location
programmability combined with the DMEMS
technology allows users to characterize true device
functionality of micro-devices as they actuate, and
to automate these measurements for production.
Customized automation and signal manipulation
is easily accomplished with full TCPIP and probe
card compatibility.
Computer-controlled ramp intensity provides the
ability to analyze samples made up of different
materials with varying reflectivities. This process
can also be automated for even greater production
throughput. Similarly, tip/tilt in the head eliminates
the need to reposition probes during characterization.
Other system features include push-button simplicity
to eliminate operator variability, and rigid
construction for superior vibration dampening and
unmatched repeatability.